• Process logic controller (PLC) based safety interlock system provides fail-safe protection of payload and critical hardware (valves, pumps, sensor, relays, etc.)
  • Desktop computer operator interface utilizing LabVIEW/Windows 2000 operating software logs command sequences, chamber configurations, and environmental conditions (temperature and pressure) with 140 user-defined TC channels available
  • Residual gas analyzer (RGA) monitors and logs gas partial pressure information; PC-based
  • Critical equipment on UPS and backup generator