• 10 feet D x 13 feet L horizontal chamber with removable endbell
  • Optional access to sensor chamber via a 60 inch gate valve at top of source chamber
  • Optional access to collimator chamber via a 60 inch gate valve at bottom of source chamber
  • 3 foot personnel access port on chamber side
  • Ultimate vacuum in low 10-7 torr range
  • Mechanical roughing system with integral LN2 cold trap
  • GN2 circulation system with thermal control from 150°C to –170°C and –185°C
  • Mechanical interfaces for UUT installation
  • Pneumatically isolated from facility with 1.5- to 3-Hz isolation system
  • LN2-cooled contamination plate
  • Two LN2/GN2 circuits for user-defined applications
  • Residual gas analyzer (RGA) monitors and logs gas partial pressure information; PC-based

 

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