Source Chamber Description
- 10 feet D x 13 feet L horizontal chamber with removable endbell
- Optional access to sensor chamber via a 60 inch gate valve at top of source chamber
- Optional access to collimator chamber via a 60 inch gate valve at bottom of source chamber
- 3 foot personnel access port on chamber side
- Ultimate vacuum in low 10-7 torr range
- Mechanical roughing system with integral LN2 cold trap
- GN2 circulation system with thermal control from 150°C to –170°C and –185°C
- Mechanical interfaces for UUT installation
- Pneumatically isolated from facility with 1.5- to 3-Hz isolation system
- LN2-cooled contamination plate
- Two LN2/GN2 circuits for user-defined applications
- Residual gas analyzer (RGA) monitors and logs gas partial pressure information; PC-based
66.76 (-0.02) 