• 13 feet OD x 21 feet L horizontal chamber with internal working dimensions of 12 feet diameter and 17 feet L with removable endbells
  • Completely shrouded with temperature uniformity of 2°C
  • Internal surfaces of shrouds painted with high emissivity coating (>0.9)
  • Removable floor shroud
  • 6 feet x 8 feet payload carriage on rail system
  • GN2 circulation system with thermal control from 150°C to –170°C and –185
  • Interface points for payload support system and other equipment (along top and bottom of chamber)°C
  • Eighteen 12 inch ISO ports for user-defined electrical and mechanical feedthroughs
  • Mechanical roughing system with integral LN2 cold traps
  • Ultimate vacuum in low 10-7 torr range
  • 20 inch interface port
  • LN2-cooled contamination plate
  • Six LN2/GN2 circuits for user-defined applications
  • Pneumatically isolated from facility with 1.5- to 3-Hz isolation system
  • Residual gas analyzer (RGA) monitors and logs gas partial pressure information; PC-based

 

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