Sensor Chamber Description
- 13 feet OD x 21 feet L horizontal chamber with internal working dimensions of 12 feet diameter and 17 feet L with removable endbells
- Completely shrouded with temperature uniformity of 2°C
- Internal surfaces of shrouds painted with high emissivity coating (>0.9)
- Removable floor shroud
- 6 feet x 8 feet payload carriage on rail system
- GN2 circulation system with thermal control from 150°C to –170°C and –185
- Interface points for payload support system and other equipment (along top and bottom of chamber)°C
- Eighteen 12 inch ISO ports for user-defined electrical and mechanical feedthroughs
- Mechanical roughing system with integral LN2 cold traps
- Ultimate vacuum in low 10-7 torr range
- 20 inch interface port
- LN2-cooled contamination plate
- Six LN2/GN2 circuits for user-defined applications
- Pneumatically isolated from facility with 1.5- to 3-Hz isolation system
- Residual gas analyzer (RGA) monitors and logs gas partial pressure information; PC-based
66.90 (-1.17) 