Collimator Chamber Description
- 7.3 feet D x 10 feet L vertical chamber, working dimensions of 6.6 feet x 10 feet with shroud
- Sides are shrouded; surfaces painted with high emissivity coating (>0.9)
- Pneumatically isolated from facility with 1.5- to 3-Hz isolation system
- Ultimate vacuum in low 10-7 torr range
- Mechanical roughing system with integral LN2 cold trap
- GN2 circulation system with thermal control from 150°C to –170°C and –185°C
- LN2-cooled contamination plate
- One LN2/GN2 circuit for user-defined application
- Residual gas analyzer (RGA) monitors and logs gas partial pressure information; PC-based
66.78 (-0.11) 