• 7.3 feet D x 10 feet L vertical chamber, working dimensions of 6.6 feet x 10 feet with shroud
  • Sides are shrouded; surfaces painted with high emissivity coating (>0.9)
  • Pneumatically isolated from facility with 1.5- to 3-Hz isolation system
  • Ultimate vacuum in low 10-7 torr range
  • Mechanical roughing system with integral LN2 cold trap
  • GN2 circulation system with thermal control from 150°C to –170°C and –185°C
  • LN2-cooled contamination plate
  • One LN2/GN2 circuit for user-defined application
  • Residual gas analyzer (RGA) monitors and logs gas partial pressure information; PC-based



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